Contacto
Como comprar
Entrega
Guia de compras
Sub-Half-Micron Lithography for ULSIs
Inglês
119 b
Até 30 dias para devoluções
Os clientes também compraram
/
Capa mole
37.08
€
/
Capa mole
46.20
€
/
Capa mole
0.00
€
/
Capa mole
20.97
€
In semiconductor-device fabrication processes, lithography technology is used to print circuit patterns on semiconductor wafers. The remarkable miniaturization of semiconductor devices has been made possible only because of the continuous progress in lithography technology. However, for the trend of ever-increasing miniaturization to continue a breakthrough in lithography technology is now needed. This book describes advanced techniques under development in Japan and elsewhere that represent the key to future semiconductor-device fabrication. The background to developments in lithography technology, trends in ULSI technology and future prospects are reviewed, and the requirements that future lithography technology must meet are described. Several important lithography methods, such as deep UV lithography, X-ray lithography, electron-beam lithography, and focused ion-beam lithography are described in detail by experts in each area. The principles underlying each of these methods are illustrated at the beginning of each chapter to help the reader understand the basis of the different approaches.
Sobre o livro
Inglês
Categorias
Ofereça este livro hoje
É fácil
1 Adicione ao carrinho e escolha Entregar como presente ao finalizar a compra 2 Receberá um vale 3 O livro chegará ao endereço do destinatárioTambém pode estar interessado em
/
Capa mole
29.89
€
/
Capa mole
9.52
€
/
Capa mole
7.29
€
Olá! Sou o Libroamiko, o seu conselheiro de livros.
Como posso ajudar?