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This book explains the principles of operation of scanning force microscopes, scanning tunneling microscopes, and related techniques. The aim of this book is to introduce the reader to scanning probe microscopy in such depth that the reader will be able to operate a scanning probe microscope successfully and understand the data obtained with the microscope. The chapters on the scanning probe techniques are complemented the by chapters on fundamentals and chapters on important technical aspects. The book applies to master s students from physics, chemistry, materials science, nanoscience and engineering, as well as graduate students and researchers new to the field.§