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Microelectronic Processing

Name: Microelectronic Processing
Brand: American Chemical Society
SKU: 04736205
Price: 55.4 EUR
Availability: InStock
Author: Dennis W. Hess
ISBN: 9780841214750

Dennis W. Hess

Klaus F. Jensen

Língua

Inglês

Livro Livro de capa dura

Código Libristo: 04736205

Editoras American Chemical Society, janeiro 1989

Although chemical engineering principles are at the heart of solid state process technology, until n... Descrição completa

Código Libristo: 04736205

134 b

55.40 €

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Although chemical engineering principles are at the heart of solid state process technology, until now no reference volume addressing this relationship was available. This is the first book of its kind to tie fundamental engineering concepts to solid state process technology. Discussing the basic concepts involved-liquid-phase epitaxy, physical and chemical vapor deposition, diffusion and oxidation in silicon, resists in microlithography, etc.-this volume will be particularly useful in chemical engineering courses. It offers a framework within which specialized courses in microelectronics processing can be organized. In addition, it serves as a valuable reference source for all industrial engineers working with the individual process steps covered.