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Devices, Structures, and Processes for Optical MEMS

Name: Devices, Structures, and Processes for Optical MEMS
Brand: VDM Verlag Dr. Mueller E.K.
SKU: 06847950
Price: 67.36 EUR
Availability: InStock
Author: Hyuck Choo
ISBN: 9783836485111

Hyuck Choo

Língua

Inglês

Livro Capa mole

Código Libristo: 06847950

Editoras VDM Verlag Dr. Mueller E.K., outubro 2008

I describe results from my research on optical MEMS at Berkeley Sensor & Actuator Center. High preci... Descrição completa

Código Libristo: 06847950

163 b

67.36 €

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I describe results from my research on optical MEMS at Berkeley Sensor & Actuator Center. High precision microlenses (200~1000?m diameters), fabricated utilizing hydrophobic effects and polymer-printing technology, have 343~7862?m focal lengths and show ?/5~?/80 wavefront aberrations at 635nm. Batch-processed polarization-beam splitters, made from low-stress Si3N4, produced extinction ratios of 16dB and 21dB at ?=635nm for transmitted and reflected light, respectively. Micromachined frequency-addressed microlens array can expand the dynamic range of a Shack-Hartmann (S-H) wavefront sensor beyond 144mrad, an improvement by a factor of 10 over conventional systems. High performance torsional microscanners, produced using our CMOS-compatible high-yield process, demonstrated a high-precision 2-D scan (scanning precision: 1?m on the scan plane). A fast, MEMS-based, phase-shifting interferometer with accuracy of 5.5nm, could continuously measure at rates up to 23Hz, a factor-of-23 improvement over PZT-based phase-shifting interferometers. I hope to leave you convinced, as am I, that opportunities for fruitful applications are extremely widespread in optical MEMS.