Advanced Integrated Circuit Manufacturing Processes/集成电路先进工艺制造

Comprehensive analysis of integrated circuit manufacturing processes, equipment principles, facility utilities, and practical techniques, accompanied by hands-on instructional videos.

全方位解析集成电路制造工艺、设备原理、厂务动力及实践技术，附实操教学视频。

Integrated circuits (ICs) are at the heart of modern electronics. With the rapid growth of the integrated circuit industry, the demand for skilled professionals is rising sharply. This book integrates the three key domains of IC manufacturing-processes, equipment, and facility utilities-and combines the theoretical foundations of IC fabrication with cutting-edge practical techniques, offering a clear and in-depth exploration of the entire IC manufacturing process. Through numerous case studies of process equipment usage, experimental data, standard operating procedures for equipment, and instructional practice videos, this book helps readers master hands-on skills. In addition to introducing current mainstream manufacturing technologies, it provides an in-depth explanation of the basic principles, power requirements, and practical applications of production-scale equipment used in the industry.

The Materials and Devices Center (MDC) at ShanghaiTech University, focusing on the cultivation of outstanding engineers in the field of advanced integrated circuit manufacturing, has leveraged its state-of-the-art equipment resources and team of senior engineers, in collaboration with industry experts, to organically combine the theory and practice of advanced IC manufacturing. This book has been meticulously crafted to provide readers with a comprehensive, in-depth, and practical learning resource. It is suitable not only for undergraduate and graduate students but also serves as a valuable reference for professional engineers and technicians engaged in IC manufacturing.

集成电路是现代电子技术的核心，随着集成电路产业迅猛发展，对专业人才的需求正急剧上升。本书从集成电路制造的工艺、设备、厂务 3 个关键内容出发，融合了集成电路制造的理论基础和前沿实践技术，深入浅出地探讨了集成电路制造的全过程。通过大量工艺设备的使用案例分析、实验数据、设备操作标准程序和教学实践视频，帮助读者掌握实际操作。此外，在介绍当前主流制造技术的同时，还深入讲解了产业界量产设备的基本原理、动力需求和应用实践。

上海科技大学材料器件中心聚焦集成电路先进制造领域卓越工程师的人才培养任务，依托先进一流的设备资源、资深工程师团队，联合产业界专家，将集成电路先进制造理论与实践有机结合，精心打造本书，旨在为读者提供全面、深入且实用的学习资料。本书不仅适用于本科生、研究生，对从事集成电路制造工作的专业工程师和技术人员也具有参考价值。